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EXTERNAL
LEVEL SENSOR SYSTEM
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Developed for
use with photoresist and other high-purity chemicals,
offers a clean reliable method of monitoring liquid
levels. Each system monitors up to four bottles. An
alarm sounds when the bottle is nearly empty, signalling
that it is time to change bottles. This cuts resist
costs by avoiding early bottle switching; and since
the bottle is not allowed to run dry, wafer reworks
and purging of the resist lines are eliminated.
- Probe, Model XLSP
An external capacitive probe is used to detect
the level of the liquid chemical through any glass
or plastic bottle, permitting the monitoring of liquids
without direct contact. The probe is mounted within
a bottle support that holds the bottle at a 45 degree
angle. The external level sensor has no moving parts
and does not need calibration.
- Module, Model XLSM
The external level sensor module monitors up to
four probes. For each probe, an audio and visual signal
occur when the alarm level is reached. The alarm can
be silenced for five minutes, after which it is reactivated.
The module also has an auxiliary output for use with
the external remote control valve, for automatic bottle
switching.
- Remote Control Valve, Model
XRCV
The remote control valve automatically switches from
an empty to a full bottle, saving personnel time.
Also particles in the lines are reduced, since particles
in the full bottle have to settle before liquid is
drawn from the bottle
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